Semiconductors

Sustain Moore’s law and contribute to never-stopping process of miniaturization and efficiency improvement of microelectronics with Ionbond coatings.

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Coating solutions for semiconductors

Semiconductor applications are often unique, calling for equally unique solutions. Depending on the actual application, standard or fine-tuned Tribobond™ and Ionbond™ CVD coatings are offered. In the latter case, Ionbond engineers carefully analyze application requirements and then propose coating solutions.

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Wafer handling

The primary function of coatings on wafer handling hardware is to prevent generation of wear debris that can contaminate the processing environment. Tribobond coatings provide ideal solutions for such challenges, due to their high wear resistance. These coatings allow efficient sealing of critical surfaces, thus helping to maintain a particulate-free operation in the long term.

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Vacuum coatings

Some of the newer semiconductor processes use vacuum, which brings additional challenges for tribological elements. In response to this, IHI Ionbond and IHI Hauzer Technocoating engineers have developed a specialty diamond-like carbon (DLC) coating, Tribobond 55, designed for operation in vacuum and other dry environments. This coating boasts an extremely low coefficient of friction in these conditions, which is impossible to achieve with regular films.

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Diffusion barrier

In some unique semiconductor machinery, IonbondCVD chemical vapor deposition (CVD) coatings can produce diffusion barriers to protect components against corrosion and erosion. These coatings are typically applied on inner surfaces of the components, enabling their reliable operation.

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Ionbond customized coating solutions

Need coatings with highly specific properties? Whether electrical properties, a particular resistivity range or the ability to withstand extremely high voltages. For these applications, Ionbond engineers work closely with the customer, offering standard, customized or specially designed solutions.

Premium coatings for industrial components

Ionbond’s coating portfolio for Industrial Components is specifically designed to accommodate applications in diverse industries, including aerospace, transportation, power generation and general engineering.

Industrial Components
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Tribobond™ 01

Traditional coating for a wide range of component applicationTribobond™ 01 TiN is arguably the oldest and most popular of PVD coatings. Aesthetically pleasing gold color and excellent mechanical prop…

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Industrial Components
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Tribobond™ 15

Wear resistance coating for high temperature applicationsIonbond’s Tribobond™ 15 TiAlCrN coating possesses an impressive combination of properties; high hardness, excellent toughness and high impact …

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Industrial Components
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Tribobond™ 20

Wear resistance coating for high temperature applicationsIonbond’s Tribobond™  20 AlTiN coating is designed to provide wear and oxidation protection at temperatures of up to 850°C.  It possesses an i…

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Industrial Components
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Tribobond™ 30

High temperature resistant coating with excellent toughnessTribobond™ 30 CrN has a good combination of properties; high hardness, excellent toughness, high wear and impact fatigue resistance. Tribobo…

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Industrial Components
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Tribobond™ 31

Low stress wear resistant coating with smooth surfaceSub-stoichiometric Tribobond™ 31 Cr2N  features  lower  residual  stress  than  many  other  coatings from the Tribobond™ portfolio,  including Cr…

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Industrial Components
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Tribobond™ 34

Wear resistant coating with a top oxide layerTribobond™ 34 CrON features standard CrN coating with a top layer of CrON. Presence of the oxide film on the surface adds additional functionalities to th…

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Industrial Components
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Tribobond™ 40

DLC-based coating for highly loaded industrial and automotive componentsIonbond’s Tribobond™ 40 DLC, also designated as a-C:H:W, is one of the widely used coatings for industrial and automotive compo…

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Industrial Components
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Tribobond™ 41

DLC coating with superior sliding propertiesIonbond’s Tribobond™ 41 DLC a-C:H:W + a-C:H coating has been used for high volume automotive production for many years. It combines good running-in propert…

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Industrial Components
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Tribobond™ 42

DLC coating for highly loaded industrial components and high volume automotive applicationsIonbond’s Tribobond™ 42 DLC, CrN + a-C:H, coating is engineered for very highly loaded components. It combin…

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Industrial Components
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Tribobond™ 43

DLC coating for industrial components with unique propertiesIonbond’s Tribobond™ 43 DLC (a-C:H) is a pure DLC coating,  which is widely used for boosting performance of tools and various precision co…

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Industrial Components
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Tribobond™ 46

DLC coating for highly loaded applications with rolling contactsIonbond’s Tribobond™ 46 DLC, CrN + a-C:H:W has a top layer similar to Tribobond™ 40; however it is deposited on CrN underlayer as oppos…

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Industrial Components
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Tribobond™ 48

Hydrogen-free DLC coating for high temperature applicationsTribobond™ 48 ta-C is a hydrogen-free DLC coating with an increased temperature resistance of up to 400 °C compared to 250 °C for hydrogenat…

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Industrial Components
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Tribobond™ 55

Special coating for vacuum and dry environmentsTribobond™ 55 is a specialty coating, which was developed to address tribological applications in dry environments, such as dry gas or vacuum. Regular D…

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Industrial Components
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Tribobond™ 66

Corrosion resistant aluminium coatingAluminum coatings offer remarkable improvement in corrosion resistance. In this case, the coating acts as a sacrificial anode in galvanic corrosion, thus protecti…

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Industrial Components
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Ionbond™ CVD

Ionbond™ CVD Coatings for Components ApplicationsOne of the limitations of the PVD and PACVD technologies is their inability to promote coatings into inner surfaces, like holes and cavities with high…

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Questions?

Discuss your challenges with Val Lieberman

Dr. Val Lieberman, Global Segment Manager Industrial Components, will be glad to support you.

We will get back to you as soon as possible.

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Dr. Val Lieberman

Global Segment Manager Industrial Components