Semiconductors

Sustain Moore’s law and contribute to never-stopping process of miniaturization and efficiency improvement of microelectronics with Ionbond coatings.

Ionbond Semiconductors
Semiconductor

Semiconductor coating solutions

Semiconductor applications are often unique, calling for equally unique solutions. Depending on the actual application, standard or customized  coatings from the Ionbond portfolio (Tribobond™ or Ionbond™ CVD families) are offered.  In all cases, Ionbond engineers carefully analyze application requirements and then propose suitable coating solutions.

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The semiconductor industry

The semiconductor industry relies heavily on specialized equipment to produce microchips and other semi-conductor devices. These machines, tasked with operating in highly demanding environments, require durable, precise, and dependable mechanical components to function optimally and with high reliability. Semiconductor machinery is usually very expensive, which makes excessive downtime and stoppage unacceptable. One solution that has proven critical to maintaining the longevity and efficiency of semiconductor equipment is the use of specialty thin film (TF) semiconductor coatings produced by PVD, PACVD and CVD deposition methods. Ionbond IHI Group is one of the leading global suppliers of these coatings, serving multiple industries from its 35 coating locations.

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Ionbond coating advantages

The thin film coatings are 1 to 20 um thick films of material deposited onto machine components using vacuum- and plasma-based processes. They are designed to enhance the performance of various semiconductor manufacturing equipment by:

  • Superior wear resistance
  • Enhanced corrosion protection
  • High thermal stability
  • Reduced friction and improved lubricity
  • Anti-sticking properties
  • Lower particulate generation
Silicon wafer

Wafer handling and transfer systems

Wafer handling systems, which move semiconductor wafers between various processing stages and hold them during processing, rely on robotic arms, sliders, and other high-precision components that must operate with minimal contamination. Applying thin film and Tribobond™ coatings to wafer handling tools provides a low-friction, wear-resistant surface that enables smooth movement and reduces particle contamination risks.

These specialized coatings are designed to prevent wear debris generation, which can jeopardize the clean processing environment. Tribobond™ coatings, with their high wear resistance, create efficient seals on critical surfaces, ensuring long-term, particulate-free operation and supporting the precision and cleanliness required in semiconductor manufacturing.

Special coatings & applications

Vacuum chambers and enclosures

Vacuum chambers, essential in semiconductor deposition and etching, require a pristine, contaminant-free environment. To achieve this, Ionbond thin film coatings are applied to chamber interiors, offering corrosion resistance and preventing material buildup. This keeps surfaces smooth and chemically stable, upholding the strict purity standards in semiconductor production.

For newer semiconductor processes that use vacuum coatings, unique tribological challenges arise. Addressing this, Ionbond engineers developed Tribobond™ 55, a diamond-like carbon coating (DLC) specially designed for vacuum and dry environments. Tribobond™ 55 provides an extremely low coefficient of friction under these conditions, unattainable with standard films, enhancing durability and performance.

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Diffusion/migration barriers

As in no other industry, cross-contamination due to close contact of two surfaces could cause serios problems for wafer processing. Equally, exposure of surfaces to corrosive gases or liquids may lead to unacceptable pollution of either the medium or the surface itself. Thin film coatings help preventing or minimizing the risks of unwanted contamination. This is achieved by creating a non-reactive barrier that isolates the contamination source.

Electrical discharge

Ionbond customized coating solutions

Need coatings with highly specific properties? Whether electrical properties, a particular resistivity range or the ability to withstand extremely high voltages. For these applications, Ionbond engineers work closely with the customer, offering standard, customized or specially designed solutions.

Premium coatings for industrial components

Ionbond’s coating portfolio for Industrial Components is specifically designed to accommodate applications in diverse industries, including aerospace, transportation, power generation and general engineering.

Industrial Components
Microsection Tribobond 01

Tribobond™ 01

Traditional coating for a wide range of component applicationTribobond™ 01 TiN is arguably the oldest and most popular of PVD coatings. Aesthetically pleasing gold color and …
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Industrial Components
Microsection Tribobond 15

Tribobond™ 15

Wear resistance coating for high temperature applicationsIonbond’s Tribobond™ 15 TiAlCrN coating possesses an impressive combination of properties; high hardness, excellent t…
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Industrial Components
Microsection Tribobond 15

Tribobond™ 20

Wear resistance coating for high temperature applicationsIonbond’s Tribobond™  20 AlTiN coating is designed to provide wear and oxidation protection at temperatures of up to …
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Industrial Components
Microsection Tribobond 30

Tribobond™ 30

High temperature resistant coating with excellent toughnessTribobond™ 30 CrN has a good combination of properties; high hardness, excellent toughness, high wear and impact fa…
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Industrial Components
Microsection Tribobond 31

Tribobond™ 31

Low stress wear resistant coating with smooth surfaceSub-stoichiometric Tribobond™ 31 Cr2N  features  lower  residual  stress  than  many  other  coatings from the Tribobond™…
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Industrial Components
Ionbond Industrial Portrait

Tribobond™ 34

Wear resistant coating with a top oxide layerTribobond™ 34 CrON features standard CrN coating with a top layer of CrON. Presence of the oxide film on the surface adds additio…
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Industrial Components
Microsection Tribobond 40

Tribobond™ 40

DLC-based coating for highly loaded industrial and automotive componentsIonbond’s Tribobond™ 40 DLC, also designated as a-C:H:W, is one of the widely used coatings for indust…
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Industrial Components
Piston Pin coating

Tribobond™ 41

DLC coating with superior sliding propertiesIonbond’s Tribobond™ 41 DLC a-C:H:W + a-C:H coating has been used for high volume automotive production for many years. It combine…
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Industrial Components
Microsection Tribobond 42

Tribobond™ 42

DLC coating for highly loaded industrial components and high volume automotive applicationsIonbond’s Tribobond™ 42 DLC, CrN + a-C:H, coating is engineered for very highly loa…
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Industrial Components
ADLC coated application

Tribobond™ 43

DLC coating for industrial components with unique propertiesIonbond’s Tribobond™ 43 DLC (a-C:H) is a pure DLC coating,  which is widely used for boosting performance of tools…
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Industrial Components
Microsection Tribobond 46

Tribobond™ 46

DLC coating for highly loaded applications with rolling contactsIonbond’s Tribobond™ 46 DLC, CrN + a-C:H:W has a top layer similar to Tribobond™ 40; however it is deposited o…
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Industrial Components
Piston Pins coating service

Tribobond™ 48

Hydrogen-free DLC coating for high temperature applicationsTribobond™ 48 ta-C is a hydrogen-free DLC coating with an increased temperature resistance of up to 400 °C compared…
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Industrial Components
Piston Pins coating service

Tribobond™ 55

Special coating for vacuum and dry environmentsTribobond™ 55 is a specialty coating, which was developed to address tribological applications in dry environments, such as dry…
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Industrial Components
Ionbond Industrial Portrait

Tribobond™ 66

Corrosion resistant aluminium coatingAluminum coatings offer remarkable improvement in corrosion resistance. In this case, the coating acts as a sacrificial anode in galvanic…
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Industrial Components
Microsection Ionbond CVD IC

Ionbond™ CVD

Ionbond™ CVD Coatings for Components ApplicationsOne of the limitations of the PVD and PACVD technologies is their inability to promote coatings into inner surfaces, like hol…
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Questions?

Discuss your challenges with Val Lieberman

Dr. Val Lieberman, Global Segment Manager Industrial Components, will be glad to support you.

We will get back to you as soon as possible.

Val Lieberman

Dr. Val Lieberman

Global Segment Manager Industrial Components