Semiconductors
Sustain Moore’s law and contribute to never-stopping process of miniaturization and efficiency improvement of microelectronics with Ionbond coatings.
Semiconductor coating solutions
Semiconductor applications are often unique, calling for equally unique solutions. Depending on the actual application, standard or customized coatings from the Ionbond portfolio (Tribobond™ or Ionbond™ CVD families) are offered. In all cases, Ionbond engineers carefully analyze application requirements and then propose suitable coating solutions.
The semiconductor industry
The semiconductor industry relies heavily on specialized equipment to produce microchips and other semi-conductor devices. These machines, tasked with operating in highly demanding environments, require durable, precise, and dependable mechanical components to function optimally and with high reliability. Semiconductor machinery is usually very expensive, which makes excessive downtime and stoppage unacceptable. One solution that has proven critical to maintaining the longevity and efficiency of semiconductor equipment is the use of specialty thin film (TF) semiconductor coatings produced by PVD, PACVD and CVD deposition methods. Ionbond IHI Group is one of the leading global suppliers of these coatings, serving multiple industries from its 35 coating locations.
Ionbond coating advantages
The thin film coatings are 1 to 20 um thick films of material deposited onto machine components using vacuum- and plasma-based processes. They are designed to enhance the performance of various semiconductor manufacturing equipment by:
- Superior wear resistance
- Enhanced corrosion protection
- High thermal stability
- Reduced friction and improved lubricity
- Anti-sticking properties
- Lower particulate generation
Wafer handling and transfer systems
Wafer handling systems, which move semiconductor wafers between various processing stages and hold them during processing, rely on robotic arms, sliders, and other high-precision components that must operate with minimal contamination. Applying thin film and Tribobond™ coatings to wafer handling tools provides a low-friction, wear-resistant surface that enables smooth movement and reduces particle contamination risks.
These specialized coatings are designed to prevent wear debris generation, which can jeopardize the clean processing environment. Tribobond™ coatings, with their high wear resistance, create efficient seals on critical surfaces, ensuring long-term, particulate-free operation and supporting the precision and cleanliness required in semiconductor manufacturing.
Vacuum chambers and enclosures
Vacuum chambers, essential in semiconductor deposition and etching, require a pristine, contaminant-free environment. To achieve this, Ionbond thin film coatings are applied to chamber interiors, offering corrosion resistance and preventing material buildup. This keeps surfaces smooth and chemically stable, upholding the strict purity standards in semiconductor production.
For newer semiconductor processes that use vacuum coatings, unique tribological challenges arise. Addressing this, Ionbond engineers developed Tribobond™ 55, a diamond-like carbon coating (DLC) specially designed for vacuum and dry environments. Tribobond™ 55 provides an extremely low coefficient of friction under these conditions, unattainable with standard films, enhancing durability and performance.
Diffusion/migration barriers
As in no other industry, cross-contamination due to close contact of two surfaces could cause serios problems for wafer processing. Equally, exposure of surfaces to corrosive gases or liquids may lead to unacceptable pollution of either the medium or the surface itself. Thin film coatings help preventing or minimizing the risks of unwanted contamination. This is achieved by creating a non-reactive barrier that isolates the contamination source.
Ionbond customized coating solutions
Need coatings with highly specific properties? Whether electrical properties, a particular resistivity range or the ability to withstand extremely high voltages. For these applications, Ionbond engineers work closely with the customer, offering standard, customized or specially designed solutions.
Premium coatings for industrial components
Ionbond’s coating portfolio for Industrial Components is specifically designed to accommodate applications in diverse industries, including aerospace, transportation, power generation and general engineering.
Questions?
Discuss your challenges with Val Lieberman
Dr. Val Lieberman, Global Segment Manager Industrial Components, will be glad to support you.
We will get back to you as soon as possible.
Dr. Val Lieberman
Global Segment Manager Industrial Components