Vacuum Semiconductors

Some of the newer semiconductor processes use vacuum, which brings additional challenges for tribological elements. In response to this, IHI Ionbond and Hauzer Technocoating engineers have developed a specialty diamond-like carbon (DLC) coating, Tribobond 55, designed for operation in vacuum and other dry environments. This coating boasts an extremely low coefficient of friction in these conditions, which is impossible to achieve with regular films.